Photochemical reactions in fluorinated sol–gel hybrid materials doped with a photolocking agent for direct micropatterning

We report on photochemical reactions in the fluorinated sol–gel hybrid materials doped with a photolocking agent consisting of 3-trimethoxysilylpropyl methacrylate (MPTS), heptadecafluorodecyltrimethoxysilane (PFAS), zirconium n-propoxide (ZPO), and methacrylic acid (MAA). We investigated the effect of the types and density of the photoinitiator, UV fluence, and the illuminating wavelength region on the microstructures and optical properties. The changes in refractive index and thickness during the photolocking process rely heavily on the remaining high index molecules from the photoinitiator. Finally, we fabricated a planar optical waveguide and microlens array using a binary contact mask through the photochemical self-developing process. The fluorinated sol–gel hybrid materials doped with a photolocking agent are promising for applications in planar optical waveguides and microlens array owing to the ease of their process.